Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9321635 | Method to release diaphragm in MEMS device | Tsung-Min Hsieh, Chien-Hsing Lee | 2016-04-26 |
| 9271087 | Microelectro-mechanical systems (MEMS) microphone package device and MEMS packaging method thereof | Tsung-Min Hsieh, Chien-Hsing Lee, Chih-Hsien Chung, Yong-Wei Chen | 2016-02-23 |
| 9264832 | Microelectromechanical system (MEMS) microphone with protection film and MEMS microphonechips at wafer level | Cheng-Wei Tsai, Chien-Hsing Lee | 2016-02-16 |