Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9428377 | Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS) | Jeremy R. Hui, Carrie Wing-Zin Low, Mehrnaz Motiee | 2016-08-30 |
| 9422149 | Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation | Louis Nervegna, Jeremy R. Hui | 2016-08-23 |
| 9422157 | Method for temperature compensation in MEMS resonators with isolated regions of distinct material | David H. Bernstein | 2016-08-23 |
| 9300227 | Monolithic body MEMS devices | Daniel N. Koury, Jr. | 2016-03-29 |
| 9260290 | Technique for forming a MEMS device | Carrie Wing-Zin Low, Jeremy R. Hui, Zhen Gu | 2016-02-16 |
| 9246412 | Suspended passive element for MEMS devices | Daniel N. Koury, Jr. | 2016-01-26 |