Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9428377 | Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS) | Emmanuel P. Quevy, Carrie Wing-Zin Low, Mehrnaz Motiee | 2016-08-30 |
| 9422149 | Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation | Emmanuel P. Quevy, Louis Nervegna | 2016-08-23 |
| 9260290 | Technique for forming a MEMS device | Emmanuel P. Quevy, Carrie Wing-Zin Low, Zhen Gu | 2016-02-16 |