Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448401 | Via structure and method thereof | Thorbjörn Ebefors, Peter Agren, Niklas Svedin | 2016-09-20 |
| 9362139 | Method of making a semiconductor device having a functional capping | Thorbjörn Ebefors, Tomas Bauer | 2016-06-07 |
| 9312217 | Methods for making a starting substrate wafer for semiconductor engineering having wafer through connections | Tomas Bauer, Thorbjörn Ebefors | 2016-04-12 |