Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252039 | Electrostatic chuck apparatus | Koki Tamagawa, Jiro Kawai | 2016-02-02 |
| 9240340 | Electrostatic chuck | Jiro Kawai | 2016-01-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252039 | Electrostatic chuck apparatus | Koki Tamagawa, Jiro Kawai | 2016-02-02 |
| 9240340 | Electrostatic chuck | Jiro Kawai | 2016-01-19 |