Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252039 | Electrostatic chuck apparatus | Norio Shiraiwa, Koki Tamagawa | 2016-02-02 |
| 9240340 | Electrostatic chuck | Norio Shiraiwa | 2016-01-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252039 | Electrostatic chuck apparatus | Norio Shiraiwa, Koki Tamagawa | 2016-02-02 |
| 9240340 | Electrostatic chuck | Norio Shiraiwa | 2016-01-19 |