Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9333618 | Method for adjusting height position of polishing head and method for polishing workpiece | — | 2016-05-10 |
| 9278425 | Polishing head and polishing apparatus | Hiromasa Hashimoto, Kouji Morita, Hiromi Kishida, Satoru Arakawa | 2016-03-08 |