Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425056 | Method for producing silicon wafer | Takuya Sasaki, Kazuya Sato, Ayumu Sato | 2016-08-23 |
| 9278425 | Polishing head and polishing apparatus | Kouji Morita, Takashi Aratani, Hiromi Kishida, Satoru Arakawa | 2016-03-08 |