Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458144 | Monomer, polymer, resist composition, and patterning process | Takayuki Fujiwara, Masayoshi Sagehashi, Koji Hasegawa | 2016-10-04 |
| 9256127 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Takayuki Fujiwara, Koji Hasegawa | 2016-02-09 |