Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431277 | Substrate treatment method and substrate treatment apparatus | Takashi Ota, Kazuhide Saito | 2016-08-30 |
| 9364873 | Substrate treatment method and substrate treatment apparatus | Akio Hashizume, Takashi Ota | 2016-06-14 |