Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9364873 | Substrate treatment method and substrate treatment apparatus | Taiki HINODE, Takashi Ota | 2016-06-14 |
| 9293352 | Substrate processing method | Yuya AKANISHI | 2016-03-22 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9364873 | Substrate treatment method and substrate treatment apparatus | Taiki HINODE, Takashi Ota | 2016-06-14 |
| 9293352 | Substrate processing method | Yuya AKANISHI | 2016-03-22 |