Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508573 | Substrate processing apparatus and substrate processing method | Shigehiro Goto, Tomohiro Matsuo, Tomohiro Goto | 2016-11-29 |
| 9465293 | Substrate processing apparatus and substrate processing method | Koji Nishiyama | 2016-10-11 |