Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508573 | Substrate processing apparatus and substrate processing method | Masahito KASHIYAMA, Shigehiro Goto, Tomohiro Matsuo | 2016-11-29 |
| 9343339 | Coating method and coating apparatus | Yukihiko Inagaki | 2016-05-17 |