Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449825 | Heat treatment apparatus for heating substrate by irradiation with flashes of light, and heat treatment method | — | 2016-09-20 |
| 9437456 | Heat treatment apparatus emitting flash of light | — | 2016-09-06 |
| 9343313 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Kazuhiko Fuse, Shinichi Kato | 2016-05-17 |
| 9330949 | Heat treatment apparatus for heating substrate by irradiating substrate with flash of light | Hideo Nishihara | 2016-05-03 |