Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502273 | Heat treatment apparatus and heat treatment method for measuring particle concentration | — | 2016-11-22 |
| 9330949 | Heat treatment apparatus for heating substrate by irradiating substrate with flash of light | Kenichi Yokouchi | 2016-05-03 |