Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472345 | Aluminum precursor, method of forming a thin film and method of forming a capacitor using the same | Sang-Chul Youn, Atsushi Sakurai, Masako HATASE, Ji-Na Kang, Naoki Yamada +1 more | 2016-10-18 |
| 9425059 | Methods of forming a pattern and methods of manufacturing a semiconductor device using the same | Ji Man Park, Hyo-Jin Yun, Jin Seo Lee, Jun-Hyun Cho, Jung-Sik Choi | 2016-08-23 |
| 9391089 | Method of manufacturing semiconductor device including nickel-containing film | Sang-Chul Youn, Gyu-hee Park, Seung-min Ryu | 2016-07-12 |
| 9359382 | β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same | Senji Wada, Jung-Sik Choi, Jin Seo Lee, Atsushi Sakurai, Kyoo-Chul Cho +5 more | 2016-06-07 |
| 9359383 | β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same | Senji Wada, Jung-Sik Choi, Jin Seo Lee, Atsushi Sakurai, Kyoo-Chul Cho +5 more | 2016-06-07 |