Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472345 | Aluminum precursor, method of forming a thin film and method of forming a capacitor using the same | Sang-Chul Youn, Atsushi Sakurai, Masako HATASE, Youn-Joung Cho, Naoki Yamada +1 more | 2016-10-18 |