Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343326 | CMP slurry composition for polishing an organic layer and method of forming a semiconductor device using the same | Yun-Jeong Kim, Sang Kyun Kim, Kwang-bok Kim, Jung-Sik Choi, Choong-Ho Han +1 more | 2016-05-17 |
| 9287132 | Multi-selective polishing slurry composition and a semiconductor element production method using the same | Jea Gun Park, Un-gyu Paik, Jin Hyung Park, Hao Cui, Jong-Young Cho +2 more | 2016-03-15 |