Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343326 | CMP slurry composition for polishing an organic layer and method of forming a semiconductor device using the same | Yun-Jeong Kim, Sang Kyun Kim, Kwang-bok Kim, Ye Hwan Kim, Jung-Sik Choi +1 more | 2016-05-17 |