Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329491 | Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus | Cédric Désiré Grouwstra, Nicolaas Rudolf Kemper, Norbertus Josephus Martinus Van Den Nieuwelaar, Dirk De Vries, Marinus Jochemsen | 2016-05-03 |
| 9263607 | Photodetector using graphene and method of manufacturing the same | Won Jong Yoo | 2016-02-16 |