Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329491 | Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus | Cédric Désiré Grouwstra, Nicolaas Rudolf Kemper, Dirk De Vries, Hua Li, Marinus Jochemsen | 2016-05-03 |