Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275884 | Systems and methods for inhibiting oxide growth in substrate handler vacuum chambers | Mukul Khosla, Arun Keshavamurthy, Richard M. Blank | 2016-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275884 | Systems and methods for inhibiting oxide growth in substrate handler vacuum chambers | Mukul Khosla, Arun Keshavamurthy, Richard M. Blank | 2016-03-01 |