Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472432 | Dedicated hot and cold end effectors for improved throughput | — | 2016-10-18 |
| 9349629 | Touch auto-calibration of process modules | Peter Thaulad, Jacob L. Hiester | 2016-05-24 |
| 9299598 | Robot with integrated aligner | — | 2016-03-29 |
| 9275884 | Systems and methods for inhibiting oxide growth in substrate handler vacuum chambers | Mukul Khosla, Ronald A. Powell, Arun Keshavamurthy | 2016-03-01 |
| 9245783 | Vacuum robot with linear translation carriage | — | 2016-01-26 |