Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529353 | Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same | Michael Binnard, Scott Coakley | 2016-12-27 |
| 9465305 | Method for determining a commutation offset and for determining a compensation map for a stage | Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo | 2016-10-11 |
| 9243969 | Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece | — | 2016-01-26 |