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Home › 2016 › Nikon › Michael Binnard
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Michael Binnard — 4 Patents in 2016

NINikon: 4 patents #11 of 289Top 4%
Belmont, CA: #25 of 264 inventorsTop 10%
California: #5,062 of 57,791 inventorsTop 9%
Overall (2016): #38,414 of 481,213Top 8%
4 Patents 2016

Issued Patents 2016

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
9529353 Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same Pai-Hsueh Yang, Scott Coakley 2016-12-27
9500960 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine — 2016-11-22
9465305 Method for determining a commutation offset and for determining a compensation map for a stage Pai-Hsueh Yang, Scott Coakley, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo 2016-10-11
9329493 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine — 2016-05-03

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