Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529353 | Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same | Pai-Hsueh Yang, Scott Coakley | 2016-12-27 |
| 9500960 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2016-11-22 |
| 9465305 | Method for determining a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo | 2016-10-11 |
| 9329493 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2016-05-03 |