Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524895 | Substrate transfer antechamber mechanism | Hitoshi Maekawa | 2016-12-20 |
| 9513567 | Exposure apparatus and exposure method | Sommawan Khumpuang, Yoshiki Inuzuka, Yasuaki Yokoyama | 2016-12-06 |
| 9478452 | Small production device and production system using the same | Hitoshi Maekawa, Shizuka NAKANO | 2016-10-25 |
| 9281223 | Coupling system | — | 2016-03-08 |
| 9254540 | Mounting structure of movable manufacturing device, fixing structure and movable manufacturing device | Shizuka NAKANO, Hitoshi Maekawa, Shinji FUTAGAWA, Takahiro Fukuda | 2016-02-09 |