Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524895 | Substrate transfer antechamber mechanism | Shiro Hara | 2016-12-20 |
| 9478452 | Small production device and production system using the same | Shiro Hara, Shizuka NAKANO | 2016-10-25 |
| 9254540 | Mounting structure of movable manufacturing device, fixing structure and movable manufacturing device | Shiro Hara, Shizuka NAKANO, Shinji FUTAGAWA, Takahiro Fukuda | 2016-02-09 |