Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9509266 | Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing | David J. Coumou | 2016-11-29 |
| 9316675 | Secondary plasma detection systems and methods | Jesse N. Klein | 2016-04-19 |