Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9509266 | Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing | Richard Pham | 2016-11-29 |
| 9336995 | Multiple radio frequency power supply control of frequency and phase | Michael L. Kirk, Daniel M. Gill | 2016-05-10 |
| 9291649 | On the enhancements of planar based RF sensor technology | Dennis M. Brown, Raymond Brooks | 2016-03-22 |
| 9294136 | Frequency interference detection and correction | — | 2016-03-22 |