Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401271 | Susceptor assemblies for supporting wafers in a reactor apparatus | Manabu Hamano | 2016-07-26 |
| 9328420 | Gas distribution plate for chemical vapor deposition systems and methods of using same | Manabu Hamano | 2016-05-03 |