Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9333645 | Optimization of start-up transient processes for dual-armed cluster tools with wafer revisiting | Naiqi Wu, Mengchu Zhou, Chunrong Pan | 2016-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9333645 | Optimization of start-up transient processes for dual-armed cluster tools with wafer revisiting | Naiqi Wu, Mengchu Zhou, Chunrong Pan | 2016-05-10 |