Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9333645 | Optimization of start-up transient processes for dual-armed cluster tools with wafer revisiting | Naiqi Wu, Chunrong Pan, Yan Qiao | 2016-05-10 |
| 9227318 | Optimal buffer space configuration and scheduling for single-arm multi-cluster tools | Liping Bai, Naiqi Wu, Zhiwu Li | 2016-01-05 |