Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9234775 | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber | Dean J. Larson, Robert C. Hefty, James V. Tietz, William S. Kennedy, Eric H. Lenz +1 more | 2016-01-12 |