Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9321000 | Airflow management for low particulate count in a process tool | — | 2016-04-26 |
| 9234775 | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber | Dean J. Larson, Robert C. Hefty, James V. Tietz, William S. Kennedy, William M. Denty, Jr. +1 more | 2016-01-12 |