Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9316443 | Method and apparatus for liquid treatment of wafer shaped articles | Karl-Heinz Hohenwarter, Christoph SEMMELROCK | 2016-04-19 |
| 9245777 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Ante Plazonic, Michael Brugger | 2016-01-26 |