Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355883 | Method and apparatus for liquid treatment of wafer shaped articles | Lach Otto | 2016-05-31 |
| 9316443 | Method and apparatus for liquid treatment of wafer shaped articles | Vijay Kumar Badam, Christoph SEMMELROCK | 2016-04-19 |