Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431216 | ICP source design for plasma uniformity and efficiency enhancement | Songlin Xu, Gang Shi | 2016-08-30 |
| 9275870 | Plasma processing method and plasma processing device | Lei Xu, Zhaohui Xi | 2016-03-01 |