SX

Songlin Xu

AE Advanced Micro-Fabrication Equipment: 1 patents #2 of 13Top 20%
📍 Shanghai, CA: #184 of 359 inventorsTop 55%
Overall (2016): #223,831 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9431216 ICP source design for plasma uniformity and efficiency enhancement Gang Shi, Tuqiang Ni 2016-08-30