Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431216 | ICP source design for plasma uniformity and efficiency enhancement | Gang Shi, Tuqiang Ni | 2016-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431216 | ICP source design for plasma uniformity and efficiency enhancement | Gang Shi, Tuqiang Ni | 2016-08-30 |