Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502238 | Deposition of conformal films by atomic layer deposition and atomic layer etch | Michal Danek, Jon Henri | 2016-11-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502238 | Deposition of conformal films by atomic layer deposition and atomic layer etch | Michal Danek, Jon Henri | 2016-11-22 |