ST

Shane Tang

Lam Research: 1 patents #108 of 356Top 35%
Overall (2016): #227,511 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9502238 Deposition of conformal films by atomic layer deposition and atomic layer etch Michal Danek, Jon Henri 2016-11-22