Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412609 | Highly selective oxygen free silicon nitride etch | Bhaskar Nagabhirava, Chih-Hsiang Wu, Ying-Ren Chen | 2016-08-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412609 | Highly selective oxygen free silicon nitride etch | Bhaskar Nagabhirava, Chih-Hsiang Wu, Ying-Ren Chen | 2016-08-09 |