SH

Seongjun Heo

Lam Research: 1 patents #108 of 356Top 35%
Overall (2016): #235,003 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9412609 Highly selective oxygen free silicon nitride etch Bhaskar Nagabhirava, Chih-Hsiang Wu, Ying-Ren Chen 2016-08-09