Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412609 | Highly selective oxygen free silicon nitride etch | Seongjun Heo, Chih-Hsiang Wu, Ying-Ren Chen | 2016-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412609 | Highly selective oxygen free silicon nitride etch | Seongjun Heo, Chih-Hsiang Wu, Ying-Ren Chen | 2016-08-09 |