Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9424636 | Method for measuring positions of structures on a mask and thereby determining mask manufacturing errors | Frank Laske, Slawomir Czerkas, Mark Wagner | 2016-08-23 |
| 9311700 | Model-based registration and critical dimension metrology | Abdurrahman Sezginer | 2016-04-12 |