Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9311698 | Detecting defects on a wafer using template image matching | Xing Chu, J. Rex Runyon | 2016-04-12 |
| 9293298 | Defect discovery and inspection sensitivity optimization using automated classification of corresponding electron beam images | — | 2016-03-22 |