Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437416 | Supercritical drying method for semiconductor substrate | Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato | 2016-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437416 | Supercritical drying method for semiconductor substrate | Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato | 2016-09-06 |