Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437416 | Supercritical drying method for semiconductor substrate | Hidekazu Hayashi, Hiroshi Tomita, Yukiko Kitajima, Yohei Sato | 2016-09-06 |
| 9384980 | Manufacturing method of semiconductor device | Yasuhito Yoshimizu, Mitsuhiro Omura, Satoshi Wakatsuki, Tsubasa Imamura | 2016-07-05 |