Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9532409 | Microwave irradiation apparatus and substrate treatment method | — | 2016-12-27 |
| 9466517 | Microwave annealing apparatus and method of manufacturing a semiconductor device | Hiroshi Ohno, Kiyotaka Miyano, Yoshinori Honguh, Masataka Shiratsuchi | 2016-10-11 |
| 9449848 | Manufacturing method for semiconductor device, annealing device, and annealing method | Kiyotaka Miyano, Wakana Kai, Tatsunori ISOGAI | 2016-09-20 |
| 9257299 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus | — | 2016-02-09 |