Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466517 | Microwave annealing apparatus and method of manufacturing a semiconductor device | Hiroshi Ohno, Tomonori Aoyama, Yoshinori Honguh, Masataka Shiratsuchi | 2016-10-11 |
| 9449848 | Manufacturing method for semiconductor device, annealing device, and annealing method | Wakana Kai, Tatsunori ISOGAI, Tomonori Aoyama | 2016-09-20 |