Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303976 | Substrate processing system and substrate processing program | Masahiro Uekita, Hiroshi Koizumi, Naoaki Sakurai, Eijiro Koike | 2016-04-05 |
| 9246065 | Semiconductor light emitting device and method for manufacturing semiconductor light emitting device | — | 2016-01-26 |