Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448740 | Storage apparatus and hierarchy control method | Hiromichi Aiura | 2016-09-20 |
| 9303976 | Substrate processing system and substrate processing program | Masahiro Uekita, Tomomichi Naka, Naoaki Sakurai, Eijiro Koike | 2016-04-05 |