Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412592 | Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device | Masamitsu Itoh | 2016-08-09 |
| 9383641 | Method of repairing defect and method of manufacturing semiconductor device | — | 2016-07-05 |
| 9377682 | Template substrate, method for manufacturing same, and template | Masamitsu Itoh | 2016-06-28 |